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TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE

Basic information Safety Related Supplier
TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Basic information
TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Chemical Properties
Safety Information
  • Hazard Codes C
  • Risk Statements 10-14/15-34
  • Safety Statements 26-36/37/39-43-45
  • RIDADR UN 3398 4.3/PG 2
  • WGK Germany 3
  • TSCA No
  • HazardClass 4.3
  • PackingGroup II
MSDS
TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Usage And Synthesis
  • UsesTantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.
TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE(169896-41-7)Related Product Information
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