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TANTALUM SILICIDE

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TANTALUM SILICIDE Basic information
TANTALUM SILICIDE Chemical Properties
  • Melting point:2200°C
  • Density 9,14 g/cm3
  • form Powder
  • Specific Gravity9.14
  • Water Solubility Insoluble in water.
  • Hydrolytic Sensitivity1: no significant reaction with aqueous systems
  • CAS DataBase Reference12039-79-1
  • EPA Substance Registry SystemTantalum silicide (TaSi2) (12039-79-1)
Safety Information
  • Safety Statements 22
  • WGK Germany 3
  • TSCA Yes
MSDS
TANTALUM SILICIDE Usage And Synthesis
  • Chemical Propertiesgray powder(s); used in the form of a 99.5%–99.95% pure material as a sputtering target in the fabrication of integrated circuits; there is also the compound Ta5Si3, 12067-56-0 [STR93] [CER91]
TANTALUM SILICIDE(12039-79-1)Related Product Information
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