Tantalum pentafluoride, TaF5, is used in petrochemistry as an isomerization and alkyalation catalyst. In addition, the fluoride can be utilized as a fluorination catalyst for the production of fluorinated hydrocarbons. The pentafluoride is produced by the direct fluorination of tantalum metal or by reacting anhydrous hydrogen fluoride with the corresponding pentoxide or oxychloride in the presence of a suitable dehydrating agent. The ability of TaF5 to act as a fluoride ion acceptor in anhydrous HF has been used in the preparation of salts of the AsH4, H3S, and PH4 ions. The oxyfluorides TaOF3 and TaO2F do not find any industrial application.