(氯甲基)三氯硅烷

Mass

MS-IW-1518          
trichloro(chloromethyl)silane
CH2Cl4Si            (Mass of molecular ion:    182)

   Source Temperature: 240 °C
   Sample Temperature: 160 °C
   Reservoir, 75 eV

      49.0       5.1
      51.0       1.6
      63.0      19.5
      64.0       1.1
      65.0       7.0
      83.0       1.0
      98.0       3.8
     100.0       2.6
     113.0       1.9
     115.0       1.2
     133.0     100.0
     134.0       5.1
     135.0      98.8
     136.0       5.0
     137.0      33.8
     138.0       1.6
     139.0       4.3
     146.0       1.8
     147.0       9.5
     148.0       2.4
     149.0       9.3
     150.0       1.2
     151.0       3.1
     182.0       8.8
     183.0       1.0
     184.0      11.3
     186.0       5.7
     188.0       1.3
     263.0       1.0