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MS-IW-1518 trichloro(chloromethyl)silane CH2Cl4Si (Mass of molecular ion: 182)
Source Temperature: 240 °C Sample Temperature: 160 °C Reservoir, 75 eV
49.0 5.1 51.0 1.6 63.0 19.5 64.0 1.1 65.0 7.0 83.0 1.0 98.0 3.8 100.0 2.6 113.0 1.9 115.0 1.2 133.0 100.0 134.0 5.1 135.0 98.8 136.0 5.0 137.0 33.8 138.0 1.6 139.0 4.3 146.0 1.8 147.0 9.5 148.0 2.4 149.0 9.3 150.0 1.2 151.0 3.1 182.0 8.8 183.0 1.0 184.0 11.3 186.0 5.7 188.0 1.3 263.0 1.0
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