タングステン(VI)ヘキサフルオリド

危険有害性情報のコード(GHS)

• 絵表示(GHS)

  

• 注意喚起語

  Danger

• 危険有害性情報

  H280：加圧ガス；熱すると爆発のおそれ

  H314：重篤な皮膚の薬傷?眼の損傷

  H330：吸入すると生命に危険

• 注意書き

  P260：粉じん/煙/ガス/ミスト/蒸気/スプレーを吸入しないこ と。

  P280：保護手袋/保護衣/保護眼鏡/保護面を着用するこ と。

  P301+P330+P331：飲み込んだ場合：口をすすぐこと。無理に吐かせ ないこと。

  P303+P361+P353：皮膚（または髪）に付着した場合：直ちに汚染された衣 類をすべて脱ぐこと/取り除くこと。皮膚を流水/シャワー で洗うこと。

  P305+P351+P338：眼に入った場合：水で数分間注意深く洗うこと。次にコ ンタクトレンズを着用していて容易に外せる場合は外す こと。その後も洗浄を続けること。

MSDS Information

• Tungsten hexafluoride

タングステン(VI)ヘキサフルオリド 化学特性,用途語,生産方法

• 説明

  Tungsten(VI) fluoride, also known as tungsten hexafluoride, WF6, is a toxic, corrosive, colorless gas, with a density of about 13 g/L (roughly 11 times heavier than air). It is one of the densest gases known under standard conditions. WF6 is frequently used by the semiconductor industry to form tungsten films, through CVD. The WF6 molecule is octahedral with the symmetry point group of Oh. The W-F bond distances are 183.2 pm. Between 2.3℃ and 17℃, tungsten hexafluoride condenses into a pale-yellow liquid with a density of 3.44 g/cm3 at 15℃. At 2.3℃ it freezes into a white solid with a cubic crystalline structure, with lattice constant of 628 pm and a calculated density of 3.99 g/cm3 . At 29℃ this structure converts to an orthorhombic solid with lattice constants of a = 960.3 pm, b = 871.3 pm, and c = 504.4 pm and a density of 4.56 g/cm3 . In this phase, the W-F distance is 181 pm, and the mean closest intermolecular contacts are 312 pm. 

• 化学的特性

  Tungsten hexafluoride is a toxic, colorless gas or a light yellow liquid.

• 使用

  In the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.

• 一般的な説明

  A toxic corrosive light yellow liquid or gas. Boiling point 67°F. Melting point 37°F. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.

• 空気と水の反応

  Decomposes in water giving hydrofluoric acid, another corrosive material.

• 反応プロフィール

  Tungsten hexafluoride emits very toxic and irritating fumes containing metallic tungsten and tungsten fluorides when heated to decomposition. Reacts violently with tetramethoxysilane [Jacob, E., Angew. Chem., 1982, 21, p. 143].

• 健康ハザード

  TOXIC; may be fatal if inhaled, ingested or absorbed through skin. Vapors are extremely irritating and corrosive. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution.

• 火災危険

  Some may burn but none ignite readily. Vapors from liquefied gas are initially heavier than air and spread along ground. Some of these materials may react violently with water. Cylinders exposed to fire may vent and release toxic and/or corrosive gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket.

• 安全性プロファイル

  A poison and corrosive liquid or gas.

• 職業ばく露

  A strong halogenating agent. Used to apply tungsten coatings to other surfaces by vapor deposition process; making electronics and components; in the manufacture of other chemicals.

• 輸送方法

  UN2196 Tungsten hexafluoride, Hazard Class: 2.3; Labels: 2.3-Poisonous gas, 8-Corrosive material, Inhalation Hazard Zone B. Cylinders must be transported in a secure upright position, in a well-ventilated truck. Protect cylinder and labels from physical damage. The owner of the compressed gas cylinder is the only entity allowed by federal law (49CFR) to transport and refill them. It is a violation of transportation regulations to refill compressed gas cylinders without the express written permission of the owner.

• 不和合性

  Decomposes on contact with water and moist air, forming highly corrosive hydrofluoric acid. Violent reaction on contact with methyl silicate.

• 廃棄物の処理

  Return refillable compressed gas cylinders to supplier. Nonrefillable cylinders should be disposed of in accordance with local, state and federal regulations. Allow remaining gas to vent slowly into atmosphere in an unconfined area or exhaust hood. Refillabletype cylinders should be returned to original supplier with any valve caps and outlet plugs secured and valve protection caps in place.

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