1,1,1,2,2,2-ヘキサフルオロエタン

化学名:1,1,1,2,2,2-ヘキサフルオロエタン

CAS番号.76-16-4

英語名:Hexafluoroethane

CBNumberCB5123920

MFC2F6

MW138.01

MOL File76-16-4.mol

别名

フレオン116

ヘキサフルオロエタン

ペルフルオロエタン

1,1,1,2,2,2-ヘキサフルオロエタン物理性質

融点	−100 °C(lit.)
沸点	−78 °C(lit.)
比重(密度)	1,607 g/cm³
蒸気密度	4.7 (vs air)
蒸気圧	430 psi ( 21 °C)
屈折率	1.2060
InChIKey	WMIYKQLTONQJES-UHFFFAOYSA-N
CAS データベース	76-16-4(CAS DataBase Reference)
EPAの化学物質情報	Hexafluoroethane (76-16-4)

安全性情報

主な危険性	Xi
Sフレーズ	38
RIDADR	UN 2193 2.2
WGK Germany	3
RTECS 番号	KI4110000
Hazard Note	Irritant
TSCA	T
国連危険物分類	2.2
HSコード	2903392820
有毒物質データの	76-16-4(Hazardous Substances Data)
化審法	一般化学物質

危険有害性情報のコード(GHS)

1,1,1,2,2,2-ヘキサフルオロエタン化学特性,用途語,生産方法

用途
冷媒、誘電性液体、推進薬 : (SITTING (5TH, 2008)
化学的特性
Hexafluoroethane is a colorless and odorless gas, or liquid under pressure. asphyxiant in high concentrations. Gas density is heavier than air. Hexafluoroethane is chemically inert and has a very high global warming potential (GWP = 11,100; Greenhouse gas protocol, Fifth Assessment Report AR5). It is an etchant and chamber cleaning agent.
使用
Hexafluoroethane is used as an important component in some refrigeration mixtures, and as a reactive ion etching gas in semiconductor materials processing applications. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.
In semiconductor applications, for example in reactive ion etching, hexafluoroethane with a fluorine to carbon ratio of 3:1 offers a unique source of highly reactive trifluoromethyl radicals without accompanying hydrogen atoms.As a result, semiconductor material plasma etching processes employing hexafluoroethane are relatively aggressive with respect to fluorine radical formation.
一般的な説明
HEXAFLUOROETHANE is a colorless, odorless gas. HEXAFLUOROETHANE is relatively inert. The mixture is nonflammable and nontoxic, though asphyxiation may occur because of displacement of oxygen. Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.
反応プロフィール
HEXAFLUOROETHANE is chemically inert in many situations, but can react violently with strong reducing agents such as the very active metals and the active metals. Can react with strong oxidizing agents or weaker oxidizing agents under extremes of temperature.
健康ハザード
Vapors may cause dizziness or asphyxiation without warning. Vapors from liquefied gas are initially heavier than air and spread along ground. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire may produce irritating, corrosive and/or toxic gases.
火災危険
Some may burn but none ignite readily. Containers may explode when heated. Ruptured cylinders may rocket.
職業ばく露
It is used as a coolant, in dielectric fluids; as a propellant and refrigerant.
輸送方法
UN2193 Hexafluoroethane or Refrigerant gas R-116, Hazard Class: 2.2; Labels: 2.2-Nonflammable compressed gas.
純化方法
Purify it for pyrolysis studies by passing through a copper vessel containing CoF3 at ca 270o, and hold for 3hours in a bottle with a heated (1300o) platinum wire. It is then fractionally distilled. [Steunenberg & Cady J Am Chem Soc 74 4165 1962, Beilstein 1 IV 132.]
不和合性
Active metals. Keep away from heat and sunlight.
廃棄物の処理
Return refillable compressed gas cylinders to supplier.

1,1,1,2,2,2-ヘキサフルオロエタン上流と下流の製品情報

1,1,1,2,2,2-ヘキサフルオロエタン生産企業

76-16-4, 1,1,1,2,2,2-ヘキサフルオロエタンキーワード

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1,1,1,2,2,2-ヘキサフルオロエタン

危険有害性情報のコード(GHS)

1,1,1,2,2,2-ヘキサフルオロエタン 化学特性,用途語,生産方法

1,1,1,2,2,2-ヘキサフルオロエタン 上流と下流の製品情報

1,1,1,2,2,2-ヘキサフルオロエタン 生産企業

76-16-4, 1,1,1,2,2,2-ヘキサフルオロエタン キーワード

1,1,1,2,2,2-ヘキサフルオロエタン化学特性,用途語,生産方法

1,1,1,2,2,2-ヘキサフルオロエタン上流と下流の製品情報

1,1,1,2,2,2-ヘキサフルオロエタン生産企業

76-16-4, 1,1,1,2,2,2-ヘキサフルオロエタンキーワード