Dichlorsilan

Gefahreninformationscode (GHS)

• Bildanzeige (GHS)

  

• Alarmwort

  Achtung

• Gefahrenhinweise

  H220：Extrem entzündbares Gas.

  H280：Enthält Gas unter Druck; kann bei Erwärmung explodieren.

  H314：Verursacht schwere Verätzungen der Haut und schwere Augenschäden.

  H331：Giftig bei Einatmen.

• Sicherheit

  P210：Von Hitze, heißen Oberflächen, Funken, offenen Flammen und anderen Zündquellenarten fernhalten. Nicht rauchen.

  P261：Einatmen von Staub vermeiden.

  P280：Schutzhandschuhe/Schutzkleidung/Augenschutz tragen.

  P305+P351+P338：BEI KONTAKT MIT DEN AUGEN: Einige Minuten lang behutsam mit Wasser spülen. Eventuell vorhandene Kontaktlinsen nach Möglichkeit entfernen. Weiter spülen.

  P310：Sofort GIFTINFORMATIONSZENTRUM/Arzt/ anrufen.

  P410+P403：Vor Sonnenbestrahlung schützen. An einem gut belüfteten Ort aufbewahren.

Dichlorosilane Chemische Eigenschaften,Einsatz,Produktion Methoden

• ERSCHEINUNGSBILD

  FARBLOSES GAS MIT CHARAKTERISTISCHEM GERUCH.

• PHYSIKALISCHE GEFAHREN

  Das Gas ist schwerer als Luft und kann sich am Boden ausbreiten. Fernzündung möglich.

• CHEMISCHE GEFAHREN

  Kann sich beim Kontakt mit Luft spontan entzünden. Zersetzung beim Erhitzen oder Verbrennen unter Bildung giftiger und ätzender Rauche mit Chlorwasserstoff. Reagiert mit Wasser oder feuchter Luft unter Bildung von Chlorwasserstoff. Greift viele Metalle in Gegenwart von Wasser an.

• ARBEITSPLATZGRENZWERTE

  TLV nicht festgelegt (ACGIH 2005).
  MAK nicht festgelegt (DFG 2005).
  

• AUFNAHMEWEGE

  Aufnahme in den Körper durch Inhalation.

• INHALATIONSGEFAHREN

  Eine gesundheitsschädliche Konzentration des Gases in der Luft wird beim Entweichen aus dem Behälter sehr schnell erreicht.

• WIRKUNGEN BEI KURZZEITEXPOSITION

  WIRKUNGEN BEI KURZZEITEXPOSITION:
  Tränenreizend. Die Substanz verätzt die Augen, die Haut und die Atemwege. Inhalation dieser Substanz kann zu Lungenödem führen (s.Anm.). Schnelle Verdampfung kann zu Erfrierungen führen. Exposition gegenüber hohen Konzentrationen kann zum Tod führen. Die Auswirkungen treten u.U. verzögert ein. ärztliche Beobachtung notwendig.

• LECKAGE

  Gefahrenbereich verlassen! Fachmann zu Rate ziehen! Belüftung. Persönliche Schutzausrüstung: Chemikalienschutzanzug mit umgebungsluftunabhängigem Atemschutzgerät.

• R-Sätze Betriebsanweisung:

  R12:Hochentzündlich.
  R14:Reagiert heftig mit Wasser.
  R23:Giftig beim Einatmen.
  R34:Verursacht Verätzungen.

• S-Sätze Betriebsanweisung:

  S26:Bei Berührung mit den Augen sofort gründlich mit Wasser abspülen und Arzt konsultieren.
  S36/37/39:Bei der Arbeit geeignete Schutzkleidung,Schutzhandschuhe und Schutzbrille/Gesichtsschutz tragen.
  S45:Bei Unfall oder Unwohlsein sofort Arzt zuziehen (wenn möglich, dieses Etikett vorzeigen).

• Beschreibung

  Dichlorosilane is a highly flammable, corrosive, and toxic gas at room temperature and atmospheric pressure. It causes severe bums on contact with eyes, skin, and mucous membranes. With water or moisture, it hydrolyzes rapidly to yield silica and silicon oxyhydride along with hydrochloric acid. It is shipped as a liquefied gas in low pressure cylinders at its vapor pressure of 9.1 psig (62.7 kPa) at 70°F (21.1℃. It can form flammable mixtures with air and oxidizing agents.

• Chemische Eigenschaften

  colourless gas

• Verwenden

  Dichlorosilane is primarily used in the electronics industry for such applications as growth of epitaxial or polycrystalline silicon and chemical vapor deposition of silicon dioxide and silicon nitride.

• Application

  Gives improved yields in reduction of imines over that of trichlorosilane.Easier to handle form of dichlorosilane.

• Allgemeine Beschreibung

  Dichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. Dichlorosilane is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Under prolonged exposure to fire or intense heat the container may rupture violently or rocket.

• Air & Water Reaktionen

  Highly flammable. Based on the properties of similar materials, there is the possibility that the reaction of Dichlorosilane with water may be vigorous or violent. Products of the reaction include hydrogen chloride. The reaction generates heat and this heat may be sufficient to ignite the product. The chlorosilicon hydrides(ClxSiHy) are spontaneously flammable in air, NFPA 1991.

• Reaktivität anzeigen

  Chlorosilanes, such as Dichlorosilane, are compounds in which silicon is bonded to from one to four chlorine atoms with other bonds to hydrogen and/or alkyl groups. Chlorosilanes react with water, moist air, or steam to produce heat and toxic, corrosive fumes of hydrogen chloride. They may also produce flammable gaseous H2. They can serve as chlorination agents. Chlorosilanes react vigorously with both organic and inorganic acids and with bases to generate toxic or flammable gases.

• Hazard

  Dichlorosilane is toxic by inhalation and skin absorption. Hydrogen chloride causes severe eye and skin burns and is irritating to the skin, eyes, and respiratory system. The four-digit UN identification number is 2189. The NFPA 704 designation is health 4, flammability 4, and reactivity 2. The white area at the bottom of the diamond contains a W with a slash through it, indicating water reactivity.

• Health Hazard

  TOXIC; may be fatal if inhaled or absorbed through skin. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution.

• Brandgefahr

  Flammable; may be ignited by heat, sparks or flames. May form explosive mixtures with air. Vapors from liquefied gas are initially heavier than air and spread along ground. Vapors may travel to source of ignition and flash back. Some of these materials may react violently with water. Cylinders exposed to fire may vent and release toxic and flammable gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket. Runoff may create fire or explosion hazard.

• Flammability and Explosibility

  Extremely flammable liquified gas

• Materials Uses

  Dichlorosilane, in the complete absence of water, can be safely stored in mild steel equipment. In the presence of even small traces of water, dichlorosilane becomes extremely corrosive since the Si-CI bonds react rapidly with water, generating hydrogen chloride.br/> Because of reactivity with water, dichlorosilane should always be handled in dry equipment with a dry inert gas such as nitrogen. For transfer service, dry inert gas is preferred to pumping. Some examples of other common compatible materials used include: Viton, Teflon, Kel-F, nickel, Monel, and some types of stainless steel.

• Sicherheitsprofil

  Moderately toxic by inhalation. Ignites spontaneously in air. Confined mixtures with air are spontaneously explosive. When heated to decomposition it emits toxic fumes of Cl-. See also CHLOROSILANES.

• Physiological effects

  Dichlorosilane hydrolyzes and oxidizes readily to release hydrogen chloride; therefore, the symptoms, effects, and treatment will be similar to those for hydrogen chloride. Dichlorosilane will cause severe bums on contact with eyes, skin, and mucous membranes.
  If dichlorosilane is inhaled, immediately remove the victim to fresh air. If breathing is difficult, give oxygen. Prompt treatment by a physician is required even if no symptoms of exposure are evident since the symptoms may be delayed.

• Lager

  Since dichlorosilane is a highly flammable, corrosive, and toxic liquefied gas, appropriate precautions must be taken in its storage and handling. During the handling of chlorosilanes, the use of such protective equipment as goggles, neoprene or natural rubber gloves, and protective clothing is essential. SCBAs, as well as both safety showers and eyewash fountains, should be available for emergency use.
  Cylinders should be assigned a definite area for storage. The area should be dry, cool, well ventilated, fire resistant, and away from ignition sources. Keep cylinders protected from excessive temperature rise by storing them away from radiators or other heat sources. Storage conditions should comply with local and state regulations.
  Cylinders may be stored in the open, but must be protected against extremes of weather and from the dampness of the ground to prevent rusting. During the summer, cylinders stored in the open should be shaded against the continuous direct rays of the sun in those localities where extreme temperatures prevail.

• Waste disposal

  Dichlorosilane should not be discharged directly into surface waters or sewer systems since an acidic waste product is formed. The disposal can be accomplished by controlled introduction of the product into water. The exothermic reactions of dichlorosilane with water (hydrolysis) result in the formation of hydrochloric acid and an insoluble silicon containing solid or fluid. In order to prevent air pollution, the quantity of water must be sufticient to dissolve all of the hydrogen chloride that will be formed. The ratio of water to dichlorosilane should be at least 10 to 1. The corrosive and exothermic nature of the reaction should be t;onsidered in selecting materials of construction for the equipment used in this procedure.
  The hydrochloric acid formed should then be neutralized with an alkali agent such as aqueous ammonia, sodium hydroxide, lime slurry, etc., and should be added as an aqueous solution with agitation to the acidic medium. Consideration must be given to the additional heat that will be produced by the neutralization. Silicon-containing solids should be washed to remove residual acid. Discard any product, residue, disposable container, or liner in an environmentally acceptable manner. Disposal of dichlorosilane by neutralizing, scrubbing, incineration, or by other means, may be subject to permitting by federal, state or provincial regulations. Persons involved with disposal of dichiorosilane should check with the environmental authorities having jurisdiction to determine the applicability of permitting regulations to disposal activities.

• GRADES AVAILABLE

  Dichlorosilane is primarily sold in ultra- high-purity grades for use in the electronics industry. A typical specification usually quantifies the acceptable levels of hydrocarbons and metals.
  Gas purity guidelines have been developed and published by Semiconductor Equipment and Materials International and can be found in the book of Book ofSEMI Standards [1].

Dichlorosilane Upstream-Materialien And Downstream Produkte

Dichlorsilan Anbieter Lieferant Produzent Hersteller Vertrieb Händler.

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