Methyltrichlorosilane

Mass

MS-NW-3861          
trichloromethylsilane
CH3Cl3Si            (Mass of molecular ion:    148)

   Source Temperature: 260 °C
   Sample Temperature: 180 °C
   Reservoir, 75 eV

      15.0       1.4
      28.0       1.3
      35.0       1.7
      36.0       1.3
      41.0       1.7
      42.0       1.8
      43.0       1.3
      49.0       2.5
      63.0      27.5
      64.0       1.6
      65.0      10.0
      76.0       1.0
      77.0       1.2
      78.0       1.1
      98.0       4.3
     100.0       3.0
     112.0       5.1
     113.0      23.4
     114.0       4.9
     115.0      15.4
     116.0       1.6
     117.0       4.4
     119.0       1.1
     133.0     100.0
     134.0       5.5
     135.0      98.3
     136.0       4.8
     137.0      33.6
     138.0       1.6
     139.0       4.5
     148.0      11.2
     149.0       1.0
     150.0      11.2
     152.0       3.8