Introduction
Perfluoro-compound TUW-3283 is a clear, colourless, thermally stable, fully-fluorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because liquidTUW-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps fluid loss to a minimumand insures that transport properties will not changewith time.
Physical Properties
Boiling Point(℃) | 128 |
Physical state : | liquid |
Specific Physical Form | liquid |
Colour: | colourless |
Odor threshold | No data Available |
Pour Point(°C) | -65 |
Flash Point(°) | None |
Absolute Viscosity (cP) | 2.5 |
Kinematic Viscosity(cSt) | 1.32 |