Trimethylfluorosilane is used in the pharmaceutical and chemical industry.
Trimethylfluorosilane can be prepared from Chlorotrimethylsilane (TMSCl) by direct treatment with Hydrofluoric Acid. It can also be generated in situ by reaction of Ethyl Trimethylsilylacetate (ETSA) and Tetra-n-butylammonium Fluoride (TBAF).
Trimethylfluorosilane is capable of silylating ketones, alcohols, and terminal alkynes.
It is a FLAMMABLE gas which is purified by fractional distillation through a column at low temperature and with the exclusion of air [Booth & Suttle J Am Chem Soc 68 2658 1946, Reid & Wilkins J Chem Soc 4029 1955]. [Beilstein 4 IV 4007.]