Germanium tetrafluoride is used in the semiconductor industry for doping and ion implantation. Combined with silane gas, germanium tetrafluoride can be used to directly fabricate silicon-germanium microcrystals on glass substrates. Germanium tetrafluoride is also used as a synthesis agent in the chemical industry.
white crystal(s); deliquescent; obtained by slow evaporation of GeO2 in 20% HF [MER06] [CRC10]
(1) Heating germanium oxide with excess calcium fluoride and concentrated sulfuric acid. (2) Thermal decomposition of barium hexafluorogermanate. BaGeF6BaF2+GeF4 Cool the resulting gas to -112C with liquid carbon disulfide to remove volatile impurities.
