Platinum complex widely used in CVD and ALD applications due, in part, to its simplicity (only C,H and Pt), volatility and moderate decomposition temperatures.
white to off-white crystals or crystalline powder
Trimethyl(methylcyclopentadienyl)platinum(IV) is used as an organometallic precursor for platinum. It is used in the microelectronics, catalysis, photonics and chemical sensing processes. It is used for the deposition of ultrathin metallic layers of platinum by the electron beam induced deposition process.
(Trimethyl)methylcyclopentadienylplatinum(IV) was used for the deposition of ultrathin metallic layers of platinum by electron beam induced deposition, atomic sputtering.These deposits find application in microelectronics, catalysis, photonics and chemical sensing.
Trimethyl(methyl cyclopentadienyl)platinum(IV) ( MeCpPtMe3) is a commonly used organometallic precursor for platinum.
