NIOBIUM SILICIDE

The Nb-based RMIC?s have much higher potential application temperatures, because of their dramatically higher melting temperatures. It is used in high temperature in situ composites.

Niobium silicide (NbSi2) is used as a lining for high-temperature refractory furnaces.

niobium suicide (NbSi2), which can be formed by reacting niobium metal deposited on poly-Si and by using APCVD from the NbCl5—SiH4—H2 system.