NIOBIUM SILICIDE

Niobium silicide (NbSi2) is used as a lining for high-temperature refractory furnaces.

The Nb-based RMICs have much higher potential application temperatures, because of their dramatically higher melting temperatures. It is used in high temperature in situ composites.

niobium suicide (NbSi2), which can be formed by reacting niobium metal deposited on poly-Si and by using APCVD from the NbCl5—SiH4—H2 system.