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37074-17-2

Heptamethyldisilazane

Product Name Heptamethyldisilazane

CAS37074-17-2

MFC7H21NSi2

MW175.42

  • 37074-17-2_ms_1
    Mass

    MS-IW-1516          
    heptamethyldisilazane
    C7H21NSi2           (Mass of molecular ion:    175)
    

       Source Temperature: 240 °C
       Sample Temperature: 160 °C
       Reservoir, 75 eV
    

          31.0       1.0
          43.0       2.5
          45.0       7.1
          59.0      14.5
          60.0       1.1
          72.0       1.9
          72.5       5.6
          73.0      28.0
          74.0       2.4
          75.0       1.2
          86.0      50.8
          87.0       4.8
          88.0       2.2
          93.0       1.9
         100.0       2.6
         117.0       4.0
         130.0       1.3
         144.0       2.0
         147.0       7.0
         148.0       1.1
         160.0     100.0
         161.0      17.2
         162.0       7.9
         175.0      15.2
         176.0       2.8
         177.0       1.2
    

liquid film

  • 37074-17-2_ir1_1