Supplier Product Identification Physical and Chemical Properties First Aid Measures Handling and Storage Hazards Identification Exposure Controls/Personal Protection Fire Fighting Measures Accidental Release Measures Stability and Reactivity Transport Information
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Tetramethylammonium hydroxide(75-59-2)

Supplier Product Identification Physical and Chemical Properties First Aid Measures Handling and Storage Hazards Identification Exposure Controls/Personal Protection Fire Fighting Measures Accidental Release Measures Stability and Reactivity Transport Information

Product Identification

Product Name
Tetramethylammonium hydroxide
Synonyms
N,N,N-Trimethylmethanaminium hydroxide
Tetramethylazanium hydroxide
TMAH
CAS
75-59-2
Formula
C4H13NO
Molecular Weight
91.15
EINECS
200-882-9
RTECS
PA0875000
RTECS Class
Other
Merck
12,9363
Beilstein/Gmelin
3558708
Beilstein Reference
4-04-00-00145

Physical and Chemical Properties

Appearance
Tetramethylammonium hydroxide is a solid in the hydrated form or a colorless liquid with a strong ammonia-like odor.
Solubility in water
Miscible
Vapor Pressure
18 (25 C)
Density
1.016 g/cm3 (25 C)
Usage
Used as a basic solvent in the development of acidic photoresist in the photolithography process.
Vapor Density
6.3
Refractive Index
1.38 (20 C)

First Aid Measures

Ingestion
Seek medical assistance.
Inhalation
Move victim to fresh air. Apply artificial respiration if victim is not breathing. Do not use mouth-to-mouth method if victim ingested or inhaled the substance; induce artificial respiration with the aid of a pocket mask equipped with a one-way valve or other proper respiratory medical device. Administer oxygen if breathing is difficult.
Skin
Remove and isolate contaminated clothing and shoes. Immediately flush with running water for at least 20 minutes. For minor skin contact, avoid spreading material on unaffected skin.
Eyes
Immediately flush with running water for at least 20 minutes.

Handling and Storage

Storage
Keep in a cool, dry, dark location in a tightly sealed container or cylinder. Keep away from incompatible materials, ignition sources and untrained individuals. Secure and label area. Protect containers/cylinders from physical damage.
Handling
All chemicals should be considered hazardous. Avoid direct physical contact. Use appropriate, approved safety equipment. Untrained individuals should not handle this chemical or its container. Handling should occur in a chemical fume hood.

Hazards Identification

Ingestion
See Inhalation.
Inhalation
TOXIC; inhalation, ingestion, or skin contact with material may cause severe injury or death. Effects of contact or inhalation may be delayed.
Skin
Contact with molten substance may cause severe burns to skin and eyes. See Inhalation.
Eyes
See Inhalation.
Hazards
When heated, vapors may form explosive mixtures with air: indoors, outdoors, and sewers explosion hazards. May polymerize explosively when heated or involved in a fire. Contact with metals may evolve flammable hydrogen gas. Containers may explode when heated. Runoff may pollute waterways. Substance may be transported in a molten form.
EC Risk Phrase
R 10 23/25 35 51
EC Safety Phrase
S 7 26 36/37/39 45
UN (DOT)
1835

Exposure Controls/Personal Protection

Personal Protection
Wear appropriate protective gloves, clothing and goggles.
Respirators
Wear positive pressure self-contained breathing apparatus (SCBA).

Fire Fighting Measures

Fire Fighting
Do not extinguish fire unless flow can be stopped. Use water in flooding quantities as fog. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible. Solid streams of water may be ineffective. Use alcohol foam, dry chemical or carbon dioxide.
Upper exp. limit
36
Lower exp. limit
6.7
Fire Potential
May burn but does not ignite readily.

Accidental Release Measures

Small spills/leaks
Keep sparks, flames, and other sources of ignition away. Keep material out of water sources and sewers. Build dikes to contain flow as necessary.

Stability and Reactivity

Incompatibilities
Avoid contact with strong acids and oxidizing agents. Attacks many plastics and rubber. May react with metallic aluminum and generate hydrogen gas.
Stability
No data.
Decomposition
Above the flash point, explosive vapor-air mixtures may be formed.
Combustion Products
Fire may produce irritating, corrosive and/or toxic gases.

Transport Information

UN Number
1835
Hazard Class
8
Packing Group
II
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