The reaction of chlorosilanes with hydroxylamine is the most common method for preparing silazanes. The amine can act as an absorbent for the HCl released during the reaction. The steric hindrance of the hydroxyl groups and substituents on the silicon significantly affects the ease of the reaction and the distribution of the products. The target compound O-(trimethylsilyl)hydroxylamine was prepared using trimethylchlorosilane and hydroxylamine as starting materials. The synthetic reaction formula is shown in the figure below:
