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TITANIUM SILICIDE
TITANIUM SILICIDE
$146 - $625.65
Product name
TITANIUM SILICIDE
Cas No
12067-57-1
MF
Si3Ti5
MW
323.59
EINECS
235-082-9
MDL Number
MFCD01310208
Synonyms
TITANIUM SILICIDE;pentatitanium trisilicide ;Titanium silicide, ti5si3;silicon:titanium;Cadmium Telluride (CdTe) Sputtering Targets
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Properties
Melting point
2130°C
Density
4.3 g/cm3
form
-325 Mesh Powder
Resistivity
55 (ρ/μΩ.cm)
Water Solubility
Soluble in hydrofluoric acid. Insoluble in water.
Crystal Structure
Hexagonal
EPA Substance Registry System
Titanium silicide (Ti5Si3) (12067-57-1)
Description
It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.
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