Perfluoropolyether

Vacuum pump fluid based on perfluoropolyether

This perfluoropolyether (PFPE) fluid is designed for vacuum pumps and high-vacuum systems where mineral oils, hydrocarbon oils and silicone fluids fail. The fully fluorinated chain contains no hydrogen, so the fluid resists attack by oxygen, halogens, acids, oxidisers and aggressive process gases, and its vapour pressure stays very low even at elevated temperature. These are the two properties that decide whether a pump fluid survives in a corrosive process.

Why it works in vacuum service

• Very low vapour pressure and low outgassing, so the achievable ultimate vacuum is not limited by the fluid itself

• Chemically inert against oxygen, chlorine, fluorine, acids and solvents, with no sludge or varnish formation

• Thermally stable over a wide range, no breakdown at the exhaust stage of rotary vane and dry pumps

• Non-flammable, no flash point, suitable for oxygen-enriched and reactive gas service

• Good lubricity and low wear even at high sliding speed

• Several viscosity grades available to match different pump models

Typical applications

• Vacuum pump lubricant for semiconductor etch, CVD, implant and flat panel processes

• Fluid for rotary vane, Roots, screw and diffusion pumps handling corrosive or reactive gases

• High-vacuum systems in coating, metallurgy, analytical instruments and leak detection

• Base oil for high-temperature and long-life greases

• Inert lubricant for bearings and seals in chemical and oxygen service

Supply

Supplied in 1 kg, 5 kg, 25 kg and drum quantities; viscosity grades and custom packing on request. Technical data sheet, COA and SDS available on request.

Independent product. Not manufactured by, affiliated with, or endorsed by any original brand holder.