N,O-Bis(trimethylsilyl)carbamate is a suitable reagent for the silylation of alcohols, phenols and carboxylic acids where the only by-products are CO2 and NH3. N,O-Bis(trimethylsilyl)carbamate is also useful in the silyloxycarbonylation of amines, and the acylisocyanates from carboxylic acid chlorides.