Formation of interchain carboxylic anhydrides on self-assembled monolayers with FluoroN,N,N′,N′-tetramethylforamidinium hexafluorophosphate.This compound is used in self-assembly to produce hydrophilic SAMs. The resulting monolayers which are terminated with carboxylic acids can be further functionalizedwith various amines and alcohols to introduce more complex end groups or multiple layers.