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Diethyl Trimethylsilyl Phosphite acts as a reagent in the synthesis of substituted N-formylaminomethylenediphosphonates and derivatives. It also functions as a reagent in the synthesis of phosphonic analog of glutamic acid.

Diethyl trimethylsilyl phosphite was used in preparation of:

• diethyl 1-aryl-1-cyanomethanephosphonates
• unsymmetrical ketones
• ketones from aldehydes via α-trimethylsiloxy-phosphonates
• phosphonates

Fractionate it under reduced pressure and has 3 1PMR: P -128ppm relative to H3PO4. [Sekine et al. J Org Chem 46 2097 1981, Chernyshev et al. J Gen Chem USSR (Engl Transl) 45 231 1975.]