Vacuum pump

Определение

vacuum pump: A pump used to reduce the gas pressure in a container. The normal laboratory rotary oil-seal pump can maintain a pressure of 10^–1 Pa. For pressures down to 10^–7 Pa a diffusion pump is required. Ion pumps can achieve a pressure of 10^–9 Pa and a cryogenic pump combined with a diffusion pump can reach 10^–13 Pa.