ChemicalBook Product Catalog Organic Chemistry Hydrocarbons and derivatives Cyclic hydrocarbons 2,2,4,4,6,6-Hexamethylcyclotrisilazane

2,2,4,4,6,6-Hexamethylcyclotrisilazane

Product Name2,2,4,4,6,6-Hexamethylcyclotrisilazane
CAS1009-93-4
MFC6H21N3Si3
MW219.51
EINECS213-773-6
MOL File1009-93-4.mol

Chemical Properties

Melting point	−10 °C(lit.)
Boiling point	188 °C756 mm Hg(lit.)
Density	0.92 g/mL at 25 °C(lit.)
vapor pressure	35Pa at 25℃
refractive index	n20/D 1.445(lit.)
Flash point	139 °F
storage temp.	2-8°C, protect from light
Water Solubility	Decomposes in contact with water,Insoluble in water
form	liquid
pka	14.76±0.20(Predicted)
color	colorless
Specific Gravity	0.922
Hydrolytic Sensitivity	7: reacts slowly with moisture/water
BRN	774739
InChI	1S/C6H21N3Si3/c1-10(2)7-11(3,4)9-12(5,6)8-10/h7-9H,1-6H3
InChIKey	WGGNJZRNHUJNEM-UHFFFAOYSA-N
SMILES	C[Si]1(C)N[Si](C)(C)N[Si](C)(C)N1
CAS DataBase Reference	1009-93-4(CAS DataBase Reference)
NIST Chemistry Reference	Hexamethylcyclotrisilazane(1009-93-4)
EPA Substance Registry System	Cyclotrisilazane, 2,2,4,4,6,6-hexamethyl- (1009-93-4)

Safety Information

Hazard Codes	Xi
Risk Statements	36/37/38
Safety Statements	26-36
RIDADR	1993
WGK Germany	3
RTECS	GZ4720000
F	10-21
TSCA	TSCA listed
HazardClass	3.2
PackingGroup	III
HS Code	29349990
Storage Class	3 - Flammable liquids
Hazard Classifications	Acute Tox. 4 Oral Eye Irrit. 2 Flam. Liq. 3 Skin Irrit. 2 STOT SE 3

MSDS

Provider	Language
ACROS	English
SigmaAldrich	English

Usage And Synthesis

Preparation

2,2,4,4,6,6-Hexamethylcyclotrisilazane was first synthesized in 1948 by Brewer and Haber via the reaction of dimethyldichlorosilane Si(CH3)2Cl2 with liquid ammonia NH3, followed by extraction and precipitation with benzene.

Description

2,2,4,4,6,6-Hexamethylcyclotrisilazane is a colorless liquid that is soluble in water. It has an odor similar to ether and a boiling point of about 100 degrees Celsius. The chemical formula for this compound is CH3(CH2)6SiCl6. 2,2,4,4,6,6-Hexamethylcyclotrisilazane has been used as a solvent for producing polymers and as a reagent for organic synthesis. It may also be used as a precursor to silicon dioxide nanoparticles used in producing semiconductors and solar cells. 2,2,4,4,6,6-Hexamethylcyclotrisilazane reacts with hydrochloric acid to produce hydrogen chloride gas and zirconium oxide. It also reacts with sodium citrate in the presence of fatty acids to form an ester product called methyl eth.

Chemical Properties

clear colorless liquid

Uses

2,2,4,4,6,6-Hexamethylcyclotrisilazane has been extensively studied as a precursor for silicon nitride and silicon carbonitride deposition and can also be used as an additive in photoresists. As one of the common silazanes, it is also a good monomer for synthesizing polymers. It readily undergoes ring-opening and copolymerizes with various monomers in the presence of hydroxyl groups, and has wide applications in the synthetic rubber and engineering plastics industries.

Hazard

Moderately toxic by ingestion.

Flammability and Explosibility

Flammable

Purification Methods

Purify it by fractional distillation at atmospheric pressure until the temperature reaches 200o. It is moisture sensitive. The residue in the flask is mostly octamethylcyclotetrasilazane. [Brewer & Haber J Am Chem Soc 70 3888 1948, Beilstein 4 III 1887.]

Toxics Screening Level

The ITSL for hexamethylcyclotrisilazane is 0.1 μg/m3 based on an annual averaging time.

2,2,4,4,6,6-Hexamethylcyclotrisilazane

Chemical Properties

Safety Information

MSDS

Usage And Synthesis

Preparation Products And Raw materials

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