Hexafluoroethane
76-16-4 Basic informationMore
- Product Name:Hexafluoroethane
- Synonyms: freon116 Hexafluorethan hexafluoro-ethan Perfluorocarbon116 PFC116 R 116 r116 R-116
- CAS:76-16-4
- MF:C2F6
- MW:138.01
- EINECS:200-939-8
- Mol File:76-16-4.mol
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USE
Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.
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- Company Name:PERIC Special Gases Co., Ltd.
- Tel:0310-7182720-613 15620672519
- Products Intro:Product Name:C2F6
CAS:76-16-4
Purity:99.999% Package:30kg - CB Index:58
- Related Information:Catalog(40)
- Company Name:Energy Chemical
- Tel:021-021-58432009 400-005-6266
- Products Intro:Product Name:Hexafluoroethane
CAS:76-16-4
Purity:>=98% Package:227G More... - CB Index:61
- Related Information:Catalog(44689)
- Company Name:Nanjing Vital Chemical Co., Ltd.
- Tel:025-87193546 18652950785
- Products Intro:CAS:76-16-4
More... - CB Index:60
- Related Information:Catalog(9021)
- Company Name:Shanghai wechem chemical co., ltd
- Tel: 18824865657
- Products Intro:Product Name:Hexafluoroethane
CAS:76-16-4
Purity:99.999% Package:47L/CGA660/40kg More... - CB Index:58
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