vacuum pump: A pump used to reduce the gas pressure in a container. The normal laboratory rotary oil-seal pump can maintain a pressure of 10–1 Pa. For pressures down to 10–7 Pa a diffusion pump is required. Ion pumps can achieve a pressure of 10–9 Pa and a cryogenic pump combined with a diffusion pump can reach 10–13 Pa.
Vacuum pump Upstream-Materialien And Downstream Produkte
