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外観
無色～ほとんど無色, 澄明の液体
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溶解性
水と反応しヘキサメチルジシロキサンになる。エーテル, ベンゼンに易溶。ジエチルエーテルに極めて溶けやすく、水及びエタノールとは反応する。
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解説
ヘキサメチルジシラザン，1,1,1-trimethyl-N-(trimethylsilyl)silanamine, bis(trimethylsilyl)amine．C6H19NSi2(161.40)．(CH3)3SiNHSi(CH3)3．クロロトリメチルシランとアンモニアとをエーテル中で反応させると得られる．無色の液体．沸点126 ℃．d4200.765．nD201.4071．加水分解されやすく，トリメチルシラノールを経てヘキサメチルジシロキサンになる．アルコール類，アミン，カルボン酸などの活性水素のシリル化剤に用いられる．アルカリ金属誘導体は強塩基として有機合成に使われる．
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用途
クロマトグラフ支持材料の非活性化、 セミコンダクター装置製造時のシリコーンまたは酸化シリコーンのフォトレジスト圧着の推進剤
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使用上の注意
不活性ガス封入
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説明
Hexamethyldisilazane is a bulk organo silicon compound, being a quite useful silanizing agent. It is a reagent for the preparation of trimethylsilyl derivatives. It can also be used to dehydrate cells of biomaterials for scanning electron microscopy (SEM). Moreover, it is an adhesion promoter for photoresist in photolithography, and is also useful in the pyrolysis-gas chromatography-mass spectrometry to enhance the detectability of compounds with polar functional groups.
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化学的特性
Hexamethyldisilazane, also known as HMDS, is an important organosilicon compound, a colorless and transparent liquid. It is readily hydrolyzed and gives off NH3 to produce hexamethyldisilyl ether. In the presence of a catalyst, it reacts with alcohols or phenols to produce trimethylalkoxysilane or trimethylaroxysilane. Reacts with anhydrous hydrogen chloride, releasing NH3 or NH4Cl, to produce trimethylchlorosilane.
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物理的性質
Colorless transparent and easy flowing liquid. Boiling point 125℃, relative density 0.76 (20/4℃). Soluble in organic solvents, it will be rapidly hydrolyzed in contact with air to form trimethylsilanol and hexamethyldisilyl ether.
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使用
Hexamethyldisilazane mainly used as methyl silane alkylation (such as amikacin, penicillin, cephalosporins and kinds of penicillin derivatives), hydroxyl protectants of antibiotics.
It is used as surface treatment agent of diatomite, white carbon black, titanium and blond additives of photoresist in the semiconductor industry.
It is used as treatment agent of tearing strength resistance.
It is used as a solvent in organic synthesis and organometallic chemistry.
It is used as an adhesion promoter for photoresist in photolithography.
it is used for the preparation of trimethylsilyl ethers from hydroxy compounds.
It is used as an alternative to critical point drying during sample preparation in electron microscopy.
It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.
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定義
ChEBI: Hexamethyldisilazane is an N-silyl compound obtained from ammonia by replacement of two of the hydrogens with trimethylsilyl groups. Hexamethyldisilazane is a derivatisation agent used in gas chromatography mass spectrometry applications. It has a role as a chromatographic reagent. It derives from a hydride of an ammonia.
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一般的な説明
Hexamethyldisilazane appears as a liquid. May be toxic by ingestion. Irritates skin and eyes. Vapors are heavier than air. May emit highly toxic nitrogen oxide fumes when heated to decomposition. Used to deactivate chromatography support materials and to promote adhesion of photoresists in the electronics industry.
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空気と水の反応
Highly flammable. Moisture sensitive.
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反応プロフィール
Hexamethyldisilazane reacts with many carbonyl containing organic compounds to generate gaseous ammonia. May be incompatible with isocyanates, halogenated organics, peroxides, phenols (acidic), epoxides, anhydrides, and acid halides. Flammable gaseous hydrogen may be generated in combination with strong reducing agents, such as hydrides.
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危険性
Flammable, moderate fire risk.
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健康ハザード
Inhalation or contact with material may irritate or burn skin and eyes. Fire may produce irritating, corrosive and/or toxic gases. Vapors may cause dizziness or suffocation. Runoff from fire control or dilution water may cause pollution.
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純化方法
A possible impurity is Me3SiCl. Wash it well with pet ether and fractionate it through a vacuum jacketed column packed with Helipac using a reflux ratio of 10:1. [Langer et al. J Org Chem 23 50 1958, Beilstein 4 IV 4014.]
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参考文献
Deng, Xiang. "Hexamethyldisilazane." Synlett 2011.06(2011):881-882. Chiavari, G, D. Fabbri, and S. Prati. "Gas chromatographic-mass spectrometric analysis of products arising from pyrolysis of amino acids in the presence of hexamethyldisilazane." Journal of Chromatography A922.1–2(2001):235-241.
Nation, J. L. "A new method using hexamethyldisilazane for preparation of soft insect tissues for scanning electron microscopy." Stain Technology 58.6(1983):347-51.
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